DocumentCode
675261
Title
Polymer microoptics for VCSEL beam control
Author
Bardinal, Veronique ; Camps, Thierry ; Abada, Sami ; Reig, Benjamin ; Doucet, Jean-Baptiste ; Daran, Emmanuelle
Author_Institution
LAAS, Toulouse, France
fYear
2013
fDate
27-30 Oct. 2013
Firstpage
1
Lastpage
2
Abstract
We present recent advances on design and fabrication of SU-8-based tunable microlens for VCSEL (Vertical-Cavity Surface-Emitting Lasers) dynamic focusing. The experimental behaviour of this optical microsystem is found to be in good agreement with a tri-dimensional thermo-mechanical model taking into account SU-8 out-plane properties.
Keywords
laser accessories; laser tuning; microlenses; optical design techniques; optical fabrication; optical focusing; optical polymers; surface emitting lasers; SU-8 out-plane properties; SU-8-based tunable microlens; VCSEL beam control; dynamic focusing; optical microsystem; polymer microoptics; tridimensional thermo-mechanical model; vertical-cavity surface-emitting lasers; Fabrication; Laser beams; Lenses; Micromechanical devices; Microoptics; Polymers; Vertical cavity surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Microoptics Conference (MOC), 2013 18th
Conference_Location
Tokyo
Type
conf
Filename
6715158
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