DocumentCode :
675262
Title :
10-Gbit/s on-chip optical interconnect module using silicon-based 45° micro-reflectors terminated polymer waveguides
Author :
Mao-Yuan Zeng ; Chin-Ta Chen ; Po-Kuan Shen ; Kai Liang ; Chia-Chi Chang ; Hsu-Liang Hsiao ; Hsiao-Chin Lan ; Yun-Chih Lee ; Yo-Shen Lin ; Mount-Learn Wu
Author_Institution :
Dept. of Opt. & Photonics, Nat. Central Univ., Jhongli, Taiwan
fYear :
2013
fDate :
27-30 Oct. 2013
Firstpage :
1
Lastpage :
2
Abstract :
In this paper, we propose a 10-Gbit/s optical interconnect module realized on the silicon optical bench (SiOB) using the silicon-based 45° micro-reflectors terminated the polymer waveguides. The silicon-based 45° micro-reflectors are fabricated on an orientation-defined (100) silicon substrate by using anisotropic chemical wet etching. The VCSEL and PD chips are assembled at the input and output ports of proposed module to demonstrate an out-of-plane optical coupling for the on-chip optical interconnects. The transmission efficiency of as high as -2.8 dB is experimentally obtained with a polymer-waveguide length of 0.5 cm. The clearly 10-Gbit/s electrical eye pattern is obtained and verifies that such a proposed module is suitable for the optical interconnects.
Keywords :
elemental semiconductors; etching; integrated optoelectronics; micro-optics; optical fabrication; optical interconnections; optical polymers; optical waveguides; photodiodes; silicon; surface emitting lasers; PD chips; Si; VCSEL chips; anisotropic chemical wet etching; bit rate 10 Gbit/s; electrical eye pattern; input ports; on-chip optical interconnect module; orientation-defined (100) silicon substrate; out-of-plane optical coupling; output ports; polymer-waveguide length; silicon optical bench; silicon-based microreflectors; transmission efficiency; Optical device fabrication; Optical interconnections; Optical waveguides; Polymers; Silicon; Substrates; Vertical cavity surface emitting lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microoptics Conference (MOC), 2013 18th
Conference_Location :
Tokyo
Type :
conf
Filename :
6715159
Link To Document :
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