Design and simulation of mass-spring-dashpot system for RFMEMS Switch

Author

Susana, J. ; Suzieyana, S. ; Ma, Radzi A. A.

Author_Institution

Fac. of Electr. & Electron. Eng., Univ. Tun Hussein Onn Malaysia, Batu Pahat, Malaysia

fYear

2013

fDate

Nov. 29 2013-Dec. 1 2013

Firstpage

516

Lastpage

519

Abstract

Design and analysis the structure of the mass-spring-dashpot of the RFMEMS switch are presented in this work. Most familiar method applies in designing MEMS switch is the spring design with difference length and width. These two parameters affect the capability of the spring to support the mass during `ON´ and `OFF´ operation by applying Hooke´s Law to identify a suitable spring constant. The analysis is to observe the effects of the electrostatic parameter in terms of voltage, pull in stability, transient rise time, harmonic mode related to the spring movement and von Mises stress of the design. The MEMS switch using this cantilever beam was 15.9375 V of pull-in voltage and transient time of 12 μs. The spring constant for this cantilever beam is 79.9 N with quality factor of 0.0158.

Keywords

beams (structures); cantilevers; microswitches; springs (mechanical); Hooke´s law; RFMEMS switch; cantilever beam; electrostatic parameter; harmonic mode; mass-spring-dashpot system; pull in stability; pull-in voltage; quality factor; spring constant; spring design; spring movement; time 12 mus; transient rise time; transient time; voltage 15.9375 V; von Mises stress; Micromechanical devices; Microswitches; Radio frequency; Springs; Stress; Transient analysis; RFMEMS; electrostatic pull-in; microswitch;

fLanguage

English

Publisher

ieee

Conference_Titel

Control System, Computing and Engineering (ICCSCE), 2013 IEEE International Conference on

Conference_Location

Mindeb

Print_ISBN

978-1-4799-1506-4

Type

conf

DOI

10.1109/ICCSCE.2013.6720019

Filename

6720019