Performance of Crossed Anisotropy Multilayered CoZrNb Films as IC Chip Level Electromagnetic Noise Suppressor

Author

Shimada, Yusuke ; Jingyan Ma ; Ito, Takao ; Yanagi, Kenjiro ; Endo, Yuta ; Muroga, Sho ; Yamaguchi, Masaki

Author_Institution

Dept. of Electr. Eng., Tohoku Univ., Sendai, Japan

Volume

50

Issue

11

fYear

2014

fDate

Nov. 2014

Firstpage

1

Lastpage

4

Abstract

Co-Zr-Nb multilayers with crossed anisotropy along with multilayers with uniaxial anisotropy were investigated from the standpoint of electromagnetic noise suppressors. Frequency dependences of conduction losses and magnetic near field intensity of a microstrip line (MSL) covered with these multilayers were measured simultaneously. It was found that ferromagnetic resonance excited by RF field from MSL takes a major role of noise suppression over a wide frequency. The ferromagnetic resonance frequency is determined by intrinsic anisotropy field. In addition, shape anisotropy field caused by presence of MSL is negligibly small. The in-plane isotropy feature of noise suppressing performance for the crossed anisotropy films was verified experimentally and numerically.

Keywords

cobalt alloys; ferromagnetic resonance; magnetic anisotropy; magnetic multilayers; magnetic thin films; metallic thin films; niobium alloys; zirconium alloys; CoZrNb; IC chip level; MSL; RF field; conduction losses; crossed anisotropy multilayered CoZrNb films; electromagnetic noise suppressor; ferromagnetic resonance frequency; intrinsic anisotropy field; magnetic near field intensity; microstrip line; shape anisotropy field; uniaxial anisotropy; Anisotropic magnetoresistance; Integrated circuits; Magnetic multilayers; Magnetic noise; Magnetic shielding; Perpendicular magnetic anisotropy; Co-Zr-Nb; Conductive loss; electromagnetic noise suppressor; ferromagnetic resonance (FMR); integrated circuit (IC) chip; microstrip line (MSL); near field; permeability thin film;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2014.2331854

Filename

6971310