Improvement of the emitter properties by controlling the interface Between dopant and substrate in laser doping for textured silicon

It is important for emitter properties to strengthen adhesion of interface between dopant and substrate in laser doping (LD). In past study, emitter properties were improved by using smooth surface compared to rough surface in LD for multi-crystalline silicon. In this study, we tried to improve emitter properties by changing interface condition from hydrophobic to hydrophilic in LD for textured surface crystalline silicon. In the result, adhesion of the interface between dopant and substrate was strengthened and surface roughness was reduced. Finally, we achieved improvement of photovoltaic characteristic in LD for textured silicon solar cell.