Embedded Planar Power Inductor in an Organic Interposer for Package-Level DC Power Grid

Author

Yazaki, Yuichiro ; Ishidate, Kazuma ; Hagita, Kazuhiro ; Kondo, Yuta ; Hattori, Saki ; Sonehara, Makoto ; Sato, Takao ; Watanabe, Toshio ; Seino, Yutaro ; Matsushita, Nobuhiro

Author_Institution

Spin Device Technol. Center, Shinshu Univ., Nagano, Japan

Volume

50

Issue

11

fYear

2014

fDate

Nov. 2014

Firstpage

1

Lastpage

4

Abstract

To realize the basic technology of a package-level dc power grid for the next generation power delivery to large scale integrated circuits (LSIs), two types of planar spiral inductors embedded in an organic interposer, for several tens of megahertz switching power supply integrated in LSI package, have been proposed. One is a Zn-Fe ferrite core spiral inductor, and another is a hybrid core spiral inductor, with quasi closed magnetic circuit consisting of the bottom Zn-Fe ferrite core and top carbonyl-iron/epoxy composite core. In this paper, the two types of planar spiral inductors have been fabricated and evaluated. From the experimental results, it was found that the hybrid core planar spiral inductor exhibited higher Q-factor and larger rating dc current than the Zn-Fe ferrite core inductor.

Keywords

power grids; power inductors; switching convertors; LSI; LSI package; embedded planar power inductor; ferrite core spiral inductor; hybrid core spiral inductor; large scale integrated circuits; megahertz switching power supply; next generation power delivery; organic interposer; package-level DC power grid; planar spiral inductors; quasiclosed magnetic circuit; Coils; Ferrites; Inductors; Magnetic cores; Permeability; Saturation magnetization; Spirals; Carbonyl-iron/epoxy composite; Zn???Fe ferrite; package-level power grid; planar power inductor;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2014.2327965

Filename

6971355