Monitoring the formation of oxide apertures in micropillar cavities

Author

Bakker, Morten P. ; Snijders, Henk ; Suntrup, Donald J. ; Truong, Tuan-Ahn ; Petroff, Pierre M. ; van Exter, Martin P. ; Bouwmeester, Dirk

Author_Institution

Huygens Lab., Leiden Univ., Leiden, Netherlands

fYear

2013

fDate

9-14 June 2013

Firstpage

1

Lastpage

2

Abstract

An imaging technique is presented that enables monitoring of the wet thermal oxidation of a thin AlAs layer embedded between two distributed Bragg reflector mirrors in a micropillar. After oxidation we confirm by white light reflection spectroscopy that high quality optical modes confined to a small volume have been formed. The combination of these two optical techniques provides a reliable and efficient way of producing oxide apertured micropillar cavities for which the wet thermal oxidation is a critical fabrication step.

Keywords

III-V semiconductors; aluminium compounds; distributed Bragg reflectors; light reflection; microcavities; micromirrors; optical fabrication; optical materials; optical testing; oxidation; AlAs; critical fabrication step; distributed Bragg reflector mirrors; high quality optical modes; imaging technique; optical techniques; oxide aperture formation monitoring; oxide apertured micropillar cavities; thin AlAs layer; wet thermal oxidation; white light reflection spectroscopy; Cavity resonators; Optical device fabrication; Optical reflection; Optical refraction; Optical variables control; Oxidation;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics (CLEO), 2013 Conference on

Conference_Location

San Jose, CA

Type

conf

Filename

6832932