• DocumentCode
    688581
  • Title

    High-Q mid-infrared chalcogenide glass-on-silicon resonators for spectroscopic chemical sensing

  • Author

    Hongtao Lin ; Lan Li ; Yi Zou ; Danto, Sylvain ; David Musgraves, J. David ; Richardson, Kathleen ; Juejun Hu

  • Author_Institution
    Dept. of Mater. Sci. & Eng., Univ. of Delaware, Newark, DE, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We fabricated and characterized high-index-contrast As2Se3 micro-disk resonators on silicon with a record loaded Q-factor of 105 at 5.2 μm wavelength. On-chip chemical sensing using cavity-enhanced infrared spectroscopy was demonstrated using the micro-disk device.
  • Keywords
    arsenic compounds; chalcogenide glasses; chemical sensors; elemental semiconductors; infrared spectra; microcavities; micromechanical resonators; microsensors; silicon; As2Se3-Si; cavity-enhanced infrared spectroscopy; high-Q mid-infrared chalcogenide glass-on-silicon resonators; high-index-contrast microdisk resonators; loaded Q-factor; microdisk device; on-chip chemical sensing; spectroscopic chemical sensing; wavelength 5.2 mum; Optical device fabrication; Optical fiber sensors; Optical ring resonators; Optical waveguides;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6832955
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=688581