• DocumentCode
    688707
  • Title

    High Q SiC on silicon microresonators

  • Author

    Cardenas, Jamie ; Mian Zhang ; Phare, Chris ; Shah, Shalin ; Poitras, Carl B. ; Lipson, Michal

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Cornell Univ., Ithaca, NY, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We demonstrate a 20um radius suspended microring resonator with Q=19,000 fabricated on SiC-on-silicon substrates. We estimate the fundamental material losses to be less than 3.3 dB/cm indicating that quality factors greater than 105 are possible.
  • Keywords
    Q-factor; elemental semiconductors; integrated optics; micro-optomechanical devices; microcavities; microfabrication; micromechanical resonators; optical losses; optical materials; optical resonators; silicon; silicon compounds; SiC-Si; SiC-on-silicon substrates; fundamental material losses; microresonators; quality factor; radius 20 mum; suspended microring resonator; Optical device fabrication; Optical fibers; Optical resonators; Silicon carbide; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833082
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=688707