Research on a Low Stiffness Passive Magnetic Levitation Gravity Compensation System with Opposite Stiffness Cancellation

Author

He Zhang ; Baoquan Kou ; Yinxi Jin ; Hailin Zhang ; Lu Zhang

Author_Institution

Dept. of Electr. Eng., Harbin Inst. of Technol., Harbin, China

Volume

50

Issue

11

fYear

2014

fDate

Nov. 2014

Firstpage

1

Lastpage

4

Abstract

In the nanopositioning system, such as the wafer stage in a lithography machine, vibration isolation is applied to decrease the influence of the lower basic frame on the upper positioning system. At present, the combination of passive gravity compensation with magnetic force and active stabilization control using linear actuators is a potential solution for vibration isolation. In this paper, an opposite stiffness cancellation method which can be used to decrease the vertical stiffness of a passive gravity compensation system is proposed. By comparison, the new passive gravity compensation system has less stiffness than that of the conventional structure. Lastly, a prototype is manufactured and tested.

Keywords

actuators; compensation; force control; gravity; magnetic levitation; nanopositioning; stability; vibration isolation; active stabilization control; linear actuators; lithography machine; low stiffness passive magnetic levitation gravity compensation system; magnetic force; nanopositioning system; opposite stiffness cancellation method; passive gravity compensation; vibration isolation; Gravity; Magnetic levitation; Magnetic resonance; Springs; Vibrations; Gravity compensation; magnetic levitation; opposite stiffness cancellation; vibration isolation;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2014.2322380

Filename

6971400