Title :
Thermal nanoimprint fabrication of chalcogenide glass waveguide resonators
Author :
Yi Zou ; Hongtao Lin ; Lan Li ; Danto, Sylvain ; Musgraves, J. David ; Richardson, Kathleen ; Juejun Hu
Author_Institution :
Dept. of Mater. Sci. & Eng., Univ. of Delaware, Newark, DE, USA
Abstract :
We demonstrated thermal nanoimprint fabrication of low loss waveguides and microring resonators in thermally evaporated and solution processed chalcogenide glass films. A high micro-ring quality factor of 75,000 is achieved at 1550 nm wavelength.
Keywords :
chalcogenide glasses; micro-optics; nanolithography; optical fabrication; optical films; optical glass; optical resonators; optical waveguides; chalcogenide glass films; chalcogenide glass waveguide resonators; low loss waveguides; micro-ring quality factor; microring resonators; thermal evaporation; thermal nanoimprint fabrication; wavelength 1550 nm; Glass; Optical device fabrication; Optical films; Optical resonators; Optical waveguides; Optimized production technology;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
