Title :
An integrated, silica-based, MEMS-actuated, tunable-bandwidth optical filter with low minimum bandwidth
Author :
Grutter, Karen E. ; Yeh, Anthony M. ; Grine, Alejandro ; Wu, Ming C.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Univ. of California, Berkeley, Berkeley, CA, USA
Abstract :
We present a MEMS-actuated tunable-bandwidth filter implemented in phosphosilicate glass (PSG). Tuning range is 0.8 to 8.5GHz. Based on performance of our stand-alone PSG resonator, minimum bandwidth in PSG can be as low as 30MHz.
Keywords :
integrated optics; micro-optomechanical devices; microactuators; micromechanical resonators; optical filters; optical glass; optical resonators; optical tuning; phosphosilicate glasses; PSG; bandwidth 0.8 GHz to 8.5 GHz; integrated silica-based MEMS-actuated tunable- bandwidth optical filter; phosphosilicate glass; stand-alone PSG resonator; Bandwidth; Optical device fabrication; Optical fibers; Optical filters; Optical ring resonators; Resonator filters;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
