Title :
Design optimization and experimental demonstration of low VπL carrier-depletion silicon Mach-Zehnder modulator
Author :
Goykhman, Ilya ; Desiatov, Boris ; Ben-Ezra, S. ; Shappir, Joseph ; Levy, Uriel
Author_Institution :
Dept. of Appl. Phys., Hebrew Univ. of Jerusalem, Jerusalem, Israel
Abstract :
We design, optimize and demonstrate a highly efficient carrier-depletion silicon Mach-Zehnder modulator with very low VπL of ~0.2Vcm. Design consideration, fabrication process and experimental results will be presented.
Keywords :
Mach-Zehnder interferometers; electro-optical modulation; integrated optics; optical design techniques; optical fabrication; optimisation; silicon; VπL carrier-depletion silicon Mach-Zehnder modulator; optical design optimization; optical fabrication process; Optical device fabrication; Optical imaging; Optical modulation; Optical refraction; Optical variables control; Silicon;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA