• DocumentCode
    689272
  • Title

    Aluminum nitride piezo-optomechanical nanobeam cavity

  • Author

    Linran Fan ; Xiankai Sun ; Chi Xiong ; Schuck, Carsten ; Tang, Hong X.

  • Author_Institution
    Dept. of Electr. Eng., Yale Univ., New Haven, CT, USA
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We develop a piezoelectrically actuated, one-dimensional photonic and phononic crystal nanocavity fabricated from aluminum nitride. High-quality piezo-optomechanical nanobeam cavities with optical Qo of 1.2 × 105 and mechanical Qm over 10,000 are obtained.
  • Keywords
    Q-factor; aluminium compounds; nanofabrication; nanophotonics; phononic crystals; photonic crystals; piezo-optical effects; piezoelectric actuators; wide band gap semiconductors; AlN; aluminum nitride; aluminum nitride piezo-optomechanical nanobeam cavity; mechanical Qm; one-dimensional photonic crystal nanocavity; optical Qo; piezoelectric actuator; piezooptomechanical nanobeam cavities; Cavity resonators; Optical amplifiers; Optical device fabrication; Optical fibers; Optical polarization; Optical resonators;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833655
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=689272