• DocumentCode
    689485
  • Title

    ISO compliant M2 measurement using a quadriwave lateral shearing interferometer wave front sensor

  • Author

    Doudet, Ivan ; Prevost, Vincent ; Wattellier, Benoit

  • Author_Institution
    PHASICS SA, Palaiseau, France
  • fYear
    2013
  • fDate
    9-14 June 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We validate the use of a quadriwave lateral shearing Wave Front Sensor (WFS) to make an ISO compliant M2 measurement. We compare measurements made following the ISO standard method with those made with the WFS.
  • Keywords
    ISO standards; light interferometers; optical testing; wavefront sensors; ISO compliant M2 measurement; ISO standard method; WFS; quadriwave lateral shearing interferometer wave front sensor; ISO; ISO standards; Laser beams; Measurement by laser beam; Position measurement; Shearing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2013 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    6833869