DocumentCode
689485
Title
ISO compliant M2 measurement using a quadriwave lateral shearing interferometer wave front sensor
Author
Doudet, Ivan ; Prevost, Vincent ; Wattellier, Benoit
Author_Institution
PHASICS SA, Palaiseau, France
fYear
2013
fDate
9-14 June 2013
Firstpage
1
Lastpage
2
Abstract
We validate the use of a quadriwave lateral shearing Wave Front Sensor (WFS) to make an ISO compliant M2 measurement. We compare measurements made following the ISO standard method with those made with the WFS.
Keywords
ISO standards; light interferometers; optical testing; wavefront sensors; ISO compliant M2 measurement; ISO standard method; WFS; quadriwave lateral shearing interferometer wave front sensor; ISO; ISO standards; Laser beams; Measurement by laser beam; Position measurement; Shearing;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location
San Jose, CA
Type
conf
Filename
6833869
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