Title :
Absorptive thin film characterization with spectroscopic full-field optical coherence tomography
Author :
Tuan-Shu Ho ; Chien-Chung Tsai ; Kuang-Yu Hsu ; Sheng-Lung Huang
Author_Institution :
Grad. Inst. of Photonics & Optoelectron., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
We have developed a spectroscopic full-field optical coherence tomography system, which can provide an ultrahigh isotropic spatial resolution. The complex refractive index and thickness of an embedded absorptive thin film was simultaneously measured.
Keywords :
optical tomography; refractive index; refractive index measurement; thickness measurement; thin films; absorptive thin film thickness measurement; refractive index measurement; spectroscopic full-field optical coherence tomography system; ultrahigh isotropic spatial resolution; Coherence; Optical films; Optical reflection; Optical refraction; Optical variables control; Refractive index; Tomography;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2013 Conference on
Conference_Location :
San Jose, CA
