DocumentCode
692160
Title
Investigation of intermediate dielectric for dual floating gate MOSFET
Author
Sarkar, B. ; Jayanti, Srikant ; Di Spigna, Neil ; Bongmook Lee ; Misra, Vishal ; Franzon, P.
Author_Institution
Dept. of Electr. Eng., North Carolina State Univ., Raleigh, NC, USA
fYear
2013
fDate
12-14 Aug. 2013
Firstpage
1
Lastpage
4
Abstract
A dual floating gate transistor offers potential as a unified memory, with simultaneous volatile and non-volatile storage. The quality of the dielectric between the two floating gates is critical to achieving the required dynamic cycle endurance. This paper reports on the results of early experiments into the material choice and process for this dielectric.
Keywords
DRAM chips; MOSFET; dielectric materials; DRAM; dual floating gate MOSFET; dual floating gate memory; dynamic cycle endurance; intermediate dielectric; Dielectrics; Flash memories; Hafnium compounds; Logic gates; MOS capacitors; Nonvolatile memory; Transistors; DRAM; EOT; MIM; endurance; flash memory; floating gate; retention;
fLanguage
English
Publisher
ieee
Conference_Titel
Non-Volatile Memory Technology Symposium (NVMTS), 2013 13th
Conference_Location
Minneapolis, MN
Type
conf
DOI
10.1109/NVMTS.2013.6851052
Filename
6851052
Link To Document