DocumentCode :
702841
Title :
Flexible gas sensing devices with directly grown tungsten oxide nanoneedles via AACVD
Author :
Vallejos, S. ; Gracia, I. ; Figueras, E. ; Sanchez, J. ; Mas, R. ; Beldarrain, O. ; Cane, C.
Author_Institution :
SIX Res. Center, Brno Univ. of Technol., Brno, Czech Republic
fYear :
2015
fDate :
11-13 Feb. 2015
Firstpage :
1
Lastpage :
4
Abstract :
Flexible gas sensing devices have been fabricated by directly integrating multilayer polymer-based platforms and highly crystalline tungsten oxide nanoneedles grown via aerosol-assisted chemical vapor deposition (AACVD). Thermal simulations and characterization of the heating element demonstrate these devices provide uniform temperature distribution at the sensing active area and gas sensing tests show repeatable and satisfactory responses towards hydrogen and ethanol. These devices go beyond traditional gas sensors, offering flexibility and functionality, with a fabrication method that provides great advantages for the integration of nanomaterials and flexible platforms and that can be used in a cost effective production for large-scale applications.
Keywords :
aerosols; chemical vapour deposition; gas sensors; nanofabrication; nanosensors; nanostructured materials; organic compounds; temperature distribution; temperature measurement; temperature sensors; tungsten compounds; AACVD; WO3; aerosol-assisted chemical vapor deposition; crystalline tungsten oxide nanoneedle growth; directly grown tungsten oxide nanoneedle; directly integrating multilayer polymer-based platform; ethanol; flexible gas sensing device; heating element characterization; nanomaterial; thermal simulation; uniform temperature distribution; Ethanol; Gas detectors; Hydrogen; Polymers; Temperature sensors; Tungsten; AACVD; flexible gas sensors; nanostructures; tungsten oxide;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electron Devices (CDE), 2015 10th Spanish Conference on
Conference_Location :
Madrid
Type :
conf
DOI :
10.1109/CDE.2015.7087483
Filename :
7087483
Link To Document :
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