• DocumentCode
    702841
  • Title

    Flexible gas sensing devices with directly grown tungsten oxide nanoneedles via AACVD

  • Author

    Vallejos, S. ; Gracia, I. ; Figueras, E. ; Sanchez, J. ; Mas, R. ; Beldarrain, O. ; Cane, C.

  • Author_Institution
    SIX Res. Center, Brno Univ. of Technol., Brno, Czech Republic
  • fYear
    2015
  • fDate
    11-13 Feb. 2015
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    Flexible gas sensing devices have been fabricated by directly integrating multilayer polymer-based platforms and highly crystalline tungsten oxide nanoneedles grown via aerosol-assisted chemical vapor deposition (AACVD). Thermal simulations and characterization of the heating element demonstrate these devices provide uniform temperature distribution at the sensing active area and gas sensing tests show repeatable and satisfactory responses towards hydrogen and ethanol. These devices go beyond traditional gas sensors, offering flexibility and functionality, with a fabrication method that provides great advantages for the integration of nanomaterials and flexible platforms and that can be used in a cost effective production for large-scale applications.
  • Keywords
    aerosols; chemical vapour deposition; gas sensors; nanofabrication; nanosensors; nanostructured materials; organic compounds; temperature distribution; temperature measurement; temperature sensors; tungsten compounds; AACVD; WO3; aerosol-assisted chemical vapor deposition; crystalline tungsten oxide nanoneedle growth; directly grown tungsten oxide nanoneedle; directly integrating multilayer polymer-based platform; ethanol; flexible gas sensing device; heating element characterization; nanomaterial; thermal simulation; uniform temperature distribution; Ethanol; Gas detectors; Hydrogen; Polymers; Temperature sensors; Tungsten; AACVD; flexible gas sensors; nanostructures; tungsten oxide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electron Devices (CDE), 2015 10th Spanish Conference on
  • Conference_Location
    Madrid
  • Type

    conf

  • DOI
    10.1109/CDE.2015.7087483
  • Filename
    7087483