Title :
Guest Editorial Special Section on the 2012 SEMI Advanced Semiconductor Manufacturing Conference
Author :
Patterson, Oliver D. ; Werbaneth, Paul ; Braggin, Jennifer ; Pulvirent, Lawrence
Author_Institution :
IBM 300-mm Fab, East Fishkill, NY, USA
Abstract :
The ten papers in this special section are enhanced versions of some of the best papers from the 2012 SEMI Advanced Semiconductor Manufacturing Conference.
Keywords :
Meetings; Semiconductor device manufacture; Special issues and sections;
Journal_Title :
Semiconductor Manufacturing, IEEE Transactions on
DOI :
10.1109/TSM.2013.2285071
