• DocumentCode
    70353
  • Title

    Guest Editorial Special Section on the 2012 SEMI Advanced Semiconductor Manufacturing Conference

  • Author

    Patterson, Oliver D. ; Werbaneth, Paul ; Braggin, Jennifer ; Pulvirent, Lawrence

  • Author_Institution
    IBM 300-mm Fab, East Fishkill, NY, USA
  • Volume
    26
  • Issue
    4
  • fYear
    2013
  • fDate
    Nov. 2013
  • Firstpage
    433
  • Lastpage
    435
  • Abstract
    The ten papers in this special section are enhanced versions of some of the best papers from the 2012 SEMI Advanced Semiconductor Manufacturing Conference.
  • Keywords
    Meetings; Semiconductor device manufacture; Special issues and sections;
  • fLanguage
    English
  • Journal_Title
    Semiconductor Manufacturing, IEEE Transactions on
  • Publisher
    ieee
  • ISSN
    0894-6507
  • Type

    jour

  • DOI
    10.1109/TSM.2013.2285071
  • Filename
    6648724
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=70353