Title :
75% efficient wide bandwidth grating couplers in a 45 nm microelectronics CMOS process
Author :
Wade, Mark T. ; Pavanello, Fabio ; Kumar, Rajesh ; Gentry, Cale M. ; Atabaki, Amir ; Ram, Rajeev ; Stojanovic, Vladimir ; Popovic, Milos A.
Author_Institution :
Dept. of Electr., Comput. & Energy Eng., Univ. of Colorado Boulder, Boulder, CO, USA
Abstract :
We present the design and characterization of highly directional vertical grating couplers achieving -1.2 dB coupling efficiency with 78nm 1- dB bandwidth realized in a commercially available 45nm microelectronics SOI process.
Keywords :
CMOS integrated circuits; diffraction gratings; integrated optoelectronics; optical design techniques; optical directional couplers; silicon-on-insulator; coupling efficiency; directional vertical grating couplers; microelectronics CMOS process; microelectronics SOI process; size 45 nm; wide bandwidth grating couplers; Bandwidth; CMOS integrated circuits; Couplers; Couplings; Gratings; Microelectronics; Silicon;
Conference_Titel :
Optical Interconnects Conference (OI), 2015 IEEE
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4799-8178-6
DOI :
10.1109/OIC.2015.7115679
