• DocumentCode
    715970
  • Title

    Calibrating temperature coefficient of frequency (TCf) and thermal expansion coefficient (α) of MoS2 nanomechanical resonators

  • Author

    Rui Yang ; Zenghui Wang ; Feng, Philip X.-L

  • Author_Institution
    Dept. of Electr. Eng. & Comput. Sci., Case Western Reserve Univ., Cleveland, OH, USA
  • fYear
    2015
  • fDate
    12-16 April 2015
  • Firstpage
    198
  • Lastpage
    201
  • Abstract
    We report on experimental study and calibration of temperature coefficient of frequency (TCf) and laser heating effect in two-dimensional (2D) resonators, and through which, a new method for determining thermal expansion coefficient (α) in 2D crystals. We measure the resonance characteristics of the `drumhead´ nanomechanical resonators based on molybdenum disulfide (MoS2) using sensitive laser interferometry. By tracking the resonance frequency at varying temperatures, we obtain high TCf up to -0.396%/K. Combining with finite element modeling (FEM), we extract α of 3.7-4ppm/K. We also measure the laser power dependence of the resonance frequency (up to -4.116%/mW), demonstrating the potential of this type of devices for sensitive thermometers and laser power meters.
  • Keywords
    calibration; crystal resonators; finite element analysis; light interferometry; molybdenum compounds; nanoelectromechanical devices; nanomechanics; thermal expansion; 2D crystals; 2D resonators; MoS2; calibration; drumhead nanomechanical resonators; finite element modeling; laser heating effect; laser power dependence; laser power meters; nanomechanical resonators; resonance characteristics; sensitive laser interferometry; sensitive thermometers; temperature coefficient of frequency; thermal expansion coefficient; Heating; Measurement by laser beam; Optical resonators; Power lasers; Resonant frequency; Temperature measurement; Temperature sensors; 2D Nanoelectromechanical Systems (NEMS); MoS2; Optical Interferometry; Resonator; TCf; Thermal Expansion;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Frequency Control Symposium & the European Frequency and Time Forum (FCS), 2015 Joint Conference of the IEEE International
  • Conference_Location
    Denver, CO
  • Print_ISBN
    978-1-4799-8865-5
  • Type

    conf

  • DOI
    10.1109/FCS.2015.7138822
  • Filename
    7138822