DocumentCode :
718093
Title :
A novel electrostatically actuated spdt rotary RF MEMS switch for ultra-broadband applications
Author :
Ilkhechi, Afshin Kashani ; Mirzajani, Hadi ; Aghdam, Esmaeil Najafi ; Ghavifekr, Habib Badri
Author_Institution :
EE Dept., Sahand Univ. of Technol., Tabriz, Iran
fYear :
2015
fDate :
10-14 May 2015
Firstpage :
1175
Lastpage :
1179
Abstract :
The objective of the paper is to design a single-pole double-throw (SPDT) radio frequency microelectromechanical system (RF MEMS) switch for ultra-broadband applications. The SPDT RF MEMS switch is driven by rotary comb-drive actuators with lateral resistive contacts. The proposed fabrication process of the switch is a standard nickel electroforming process on a glass substrate. Chosen electrostatic actuators decrease the power consumption of the switch near to zero and provides good contact force which results less contact resistance. As a result, good RF characteristics were achieved. The designed SPDT RF MEMS switch has a drive voltage of 50V, switching times from OFF to state I or II and vice versa shorter than 79μs and 130μs, an insertion loss below -0.73dB up to 90GHz, a return loss below -16.43dB and an isolation below -23.91dB.
Keywords :
contact resistance; driver circuits; electroforming; electrostatic actuators; microswitches; SPDT RF MEMS switch; contact resistance; electrostatic actuators; electrostatically actuated SPDT rotary; glass substrate; lateral resistive contacts; nickel electroforming process; radio frequency microelectromechanical system switch; rotary comb-drive actuators; single-pole double-throw; ultrabroadband applications; voltage 50 V; Conferences; Decision support systems; Electrical engineering; Three-dimensional displays; RF MEMS; SPDT; electrostatic; rotary comb-drive; switch;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Electrical Engineering (ICEE), 2015 23rd Iranian Conference on
Conference_Location :
Tehran
Print_ISBN :
978-1-4799-1971-0
Type :
conf
DOI :
10.1109/IranianCEE.2015.7146392
Filename :
7146392
Link To Document :
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