A novel discharge system based on jagged electrodes with controllable spacing

A discharge system with jagged electrodes gap fabricated by MEMS fabrication technique was proposed in this paper. By utilizing a voltage multiplier as energy accumulation module, repeatedly spark breakdown in air was performed through this designed electrodes. Finite element analysis has been done for simulating the arc generation. The device was fabricated by MEMS process and relative experiments were carried out. Through the damage on the two electrodes which further investigated by the microscope images, the arc generation of this device was confirmed. This novel discharge system has promising applications in sterilization, ozone production and arc lightening, etc.