Highly Sensitive Coplanar Line Thin-Film Sensor Using SrTiO Film

Author

Uetake, Hiroaki ; Kawakami, Tomoya ; Yabukami, Shin ; Ozawa, Toshihiro ; Kobayashi, Nao ; Arai, Ken Ichi

Author_Institution

Tohoku Gakuin Univ., Tagajo, Japan

Volume

50

Issue

11

fYear

2014

fDate

Nov. 2014

Firstpage

1

Lastpage

4

Abstract

A very sensitive thin-film sensor was developed using a coplanar line fabricated from SrTiO (Sr₃₃Ti₁₆O₅₁) film (0.5, 1, 2, 3, and 6 μm thick), amorphous CoNbZr film (5 μm thick), and Cu/Cr film (4 μm/0.2 μm). The deposited SrTiO film had high permittivity of around 31. This film enhanced the sensitivity of the magnetic field sensor, a phase change of more than 100°/Oe and gain of over -40 dB being achieved simultaneously. The sensor with SrTiO film enhanced the sensitivity about 1.6 times greater than that with SiO₂ film because of the high permittivity of the SrTiO film. The sensitivity of the sensor increased with increasing thickness of the SrTiO film, a thickness of around 3 μm being sufficient for enhancement of the sensitivity.

Keywords

chromium; cobalt alloys; copper; magnetic field measurement; magnetic sensors; niobium alloys; strontium compounds; thin film sensors; zirconium alloys; CoNbZr; Cu-Cr; Sr₃₃Ti₁₆O₅₁; highly sensitive coplanar line thin-film sensor; magnetic field sensor; size 0.2 mum; size 0.5 mum; size 1 mum; size 2 mum; size 3 mum; size 4 mum; size 5 mum; size 6 mum; thickness measurement; Amorphous magnetic materials; Gain; Magnetic anisotropy; Magnetic resonance; Magnetometers; Permittivity; Sensitivity; Coplanar line; Sr33Ti16O51 film; thin-film sensor;

fLanguage

English

Journal_Title

Magnetics, IEEE Transactions on

Publisher

ieee

ISSN

0018-9464

Type

jour

DOI

10.1109/TMAG.2014.2331676

Filename

6971665