Analytical modeling and simulation of low-frequency Lorentz-force transduced micromechanical cantilever resonator

In this paper analytical modeling of Lorentz-force transduced micromechanical resonator is presented at the transfer function level. Such resonators are useful for low-frequency filtering applications in the field of biomedical and RF communication area. The present work focuses on the utilization of Lorentz force actuation with piezoresistive sensing for the realization of vertical flexural mode micromechanical cantilever beam resonator. The focus of the work is mainly confined to the actuation/detection principle of flexural mode cantilever beam resonators. Lorentz-force transduced micromechanical filters have much lower computed motional resistance as compared to the electrostatic transduced MEMS filters due to the absence of involvement of the transduction gap in its actuation mechanism also have large out-of-plane displacement, and the requirement of low driving voltage compared to electrostatic actuation.