Title :
Semiconductor green fabrication innovative energy efficient design and operational optimization of chilled water system
Author :
Shyu, J.S. ; Zhu, L.K. ; Anandani, Tarun ; Wang, Y.J. ; Fung, H.W. ; Chang, C.N.
Author_Institution :
Facility Dept., Taiwan Semicond. Manuf. Co., Ltd., Hsinchu, Taiwan
Abstract :
This study surpassed traditional energy-saving ideas to propose a multi-core concept implementation of an energy-saving optimization model. The model allowed systems to match the optimum status, and used multi-core concept implementation for frequency conversions according to different weather conditions and air conditioning load changes, allowing systems to run at their optimum states for ideal energy-saving operations. This study probed into the power and energy consumption behavior models of chiller and system devices, focusing on how systems could reach optimization. The energy-saving effects were determined from the operating results and practical electric meter pricing. The annual saved energy costs were as high as USD $3820k per year, which included a cooling water pump energy-saving benefit of USD $1920k and a cooling tower and chilled water pump energy-saving benefit of USD $1900k. Annual CO2 emissions were reduced by 32,870 tons, which was the equivalent of the amount of CO2 absorbed by 2,728,460 trees.
Keywords :
air conditioning; energy conservation; environmental factors; integrated circuit manufacture; air conditioning load; chilled water system; electric meter pricing; frequency conversions; innovative energy efficient design; multicore concept implementation; operational optimization; semiconductor green fabrication; weather conditions; Air conditioning; Optimization; Poles and towers; Pumps; Water heating;
Conference_Titel :
Advanced Semiconductor Manufacturing Conference (ASMC), 2015 26th Annual SEMI
Conference_Location :
Saratoga Springs, NY
DOI :
10.1109/ASMC.2015.7164496