Temperature dependent characteristics of intrinsically switchable ferroelectric composite FBARs

Author

Lee, Seungku ; Zolfagharloo Koohi, Milad ; Sis, Seyit Ahmet ; Lee, Victor ; Mortazawi, Amir

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., Univ. of Michigan, Ann Arbor, MI, USA

fYear

2015

fDate

17-22 May 2015

Firstpage

1

Lastpage

4

Abstract

This paper presents temperature dependent characteristics of intrinsically switchable ferroelectric composite FBARs. Ba_0.5Sr_0.5TiO₃ and Si are used to form a composite FBAR. Measurement results show that both series and parallel resonance frequencies decrease with the temperature. The temperature coefficient of frequency is approximately -35 ppm/°C. The variation of quality factor and electromechanical coupling coefficient is less than 6.5% and 6.2% above 20 V bias.

Keywords

Q-factor; acoustic resonators; barium compounds; ferroelectric devices; silicon; strontium compounds; Ba_0.5Sr_0.5TiO₃; FBAR; Si; electromechanical coupling coefficient; film bulk acoustic resonators; parallel resonance frequency; quality factor; series resonance frequency; switchable ferroelectric composite; temperature dependent characteristic; Film bulk acoustic resonators; Frequency measurement; Magnetic resonance; Resonator filters; Temperature measurement; Wireless communication; BST; composite FBAR; electrostriction; temperature coefficient of frequency (TCF);

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Symposium (IMS), 2015 IEEE MTT-S International

Conference_Location

Phoenix, AZ

Type

conf

DOI

10.1109/MWSYM.2015.7167036

Filename

7167036