Application of mode switching control using initial state variables in constraint final-state control to high-precision dual stage

Precise positioning stages with high-speed and high-precision control performance are increasingly required for improving production efficiency and quality. In this paper, a final-state control method considering input limitation is applied to a novel high-precision dual stage during acceleration. In the method, the timing to activate the final-state control is automatically determined by a proposed criterion. The method can significantly reduce the calculation time so that real-time implementation becomes possible. Experimental results illustrate that the method can reduce the maximum thrust of the fine stage without degrading control performance.