A new MOCVD platform, prismo D-Blue™, for high-throughput GaN LED production

A new MOCVD platform, the Prismo D-Blue™, was designed and manufactured at Advanced Micro-Fabrication Equipment Inc. (AMEC) for high-volume manufacturing of high-brightness Light Emitting Diodes (LEDs). The long- term process stability and repeatability were investigated and demonstrated. Based on a well-tuned laminar gas flow condition and very stable temperature control system using dual-wavelength pyrometer sensors, more than 52 LED production runs with repeated chip performance were achieved. The LED quick test data of LED brightness, wavelength and ESD show excellent repeatability for AMEC\´s Prismo D-Blue™ System. In addition, various graphite susceptor designs for 4" sapphire substrates were also investigated for good wafer uniformity. With different pocket depth for inner-ring and outer-ring, good susceptor (14×4" LED wafers) wavelength uniformity of <;1.6 nm was achieved.