DocumentCode
729645
Title
Kerf-free wafer slicing and thinning for semiconductor applications
Author
Lichtensteiger, Lukas
Author_Institution
Siltectra GmbH, Dresden, Germany
fYear
2013
fDate
10-12 Nov. 2013
Firstpage
85
Lastpage
88
Abstract
The waste of valuable raw material due to kerf-loss during manufacturing of wafers is an important problem not only in photovoltaics but also in the semiconductor industry in general. Although a number of kerf-free wafering methods have been developed over the past decades they have not found significant use outside of the PV industry, due to some inherent shortcomings of those methods. Recently, we have been able to achieve a major step forward in this regard. In this paper we present a novel kerf-free technology that is able to overcome the main limitations of existing kerf-less wafering methods that have prevented them from being adopted in semiconductor applications outside of the PV sector. In particular, we demonstrate that the Siltectra-Method (i) can produce wafers from a range of materials commonly used in semiconductor applications, such as Si, Ge, GaAs, SiC, etc, at the required diameters (currently up to 300mm wafers have been successfully manufactured), with the appropriate crystal orientations, (ii) that it can also produce wafers with thicknesses in the range required by semiconductor applications (which are generally thicker than in PV), and (iii) that it can potentially even be used as a material-saving alternative to many wafer thinning applications. As a proof-of-concept example we use our method for manufacturing full size solar cells and panels having the same performance as reference cells but requiring 25% less feedstock material. Furthermore, our cells show an average conversion efficiency of 17.4%, which to the best of our knowledge is the highest efficiency reported for any solar cell produced by kerf-less wafering methods so far.
Keywords
photovoltaic power systems; raw materials; semiconductor device manufacture; solar cell arrays; PV industry; PV sector; Siltectra-method; conversion efficiency; crystal orientation; feedstock material; kerf-free technology; kerf-free wafer slicing and thinning; kerf-free wafering method; kerf-less wafering method; kerf-loss; material-saving alternative; photovoltaics; proof-of-concept example; raw material; reference cell; semiconductor application; semiconductor industry; solar cell; solar panel; wafer manufacturing; wafer thinning application; Context; Gallium arsenide; Polymers; Production; Silicon; Temperature distribution; Thermal force;
fLanguage
English
Publisher
ieee
Conference_Titel
Solid State Lighting (ChinaSSL), 2013 10th China International Forum on
Conference_Location
Beijing
Print_ISBN
978-1-4799-2249-9
Type
conf
DOI
10.1109/SSLCHINA.2013.7177320
Filename
7177320
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