Abstract :
This book begins with an original discussion and definitions of sensor, smartness, intelligence, and MEMS and ends with terminology improvement. The textbook is divided into two parts and 17 chapters. Chapters 2??9 are dedicated to advanced sensor solutions, while the second part of book begins with Chapter 10, describing MEMS fabrication processes. Chapters 11 and 12 deal with specific devices and industrial applications of smart MEMS, while Chapters 13??17 further study applications of smart MEMS, ranging from motion sensors and printer heads to end with smart acoustic sensors. The textbook is divided into two parts and 17 chapters. This book offers a valuable analysis of smart sensors and MEMS, with chapters written by researchers involved in the creation of technology and standards. All of the chapters are easy to read and hundreds of references are provided. A preface, table of contents, and index are also included. This book is a valuable tool for graduate researchers, practicing engineers,and scientists working in the areas of sensor devices and MEMS. It provides technical background on subjects and electronic interface circuits and, therefore, is also suitable for senior undergraduates and master??s level students of instrumentation and electrical and computer engineering.
