Title :
Characteristics of an argon DC glow discharge and effect of cathode material on paschen curve and cathode temperature
Author :
Satir, Mert ; Celik, Murat
Author_Institution :
Dept. of Mech. Eng., Bogazici Univ., Istanbul, Turkey
Abstract :
DC glow discharge is used in a vast range of industrial applications such as plasma processing, thin film coating by sputtering, etching, welding and light sources1. Understanding the discharge properties is essential for better integration of these applications.
Keywords :
cathodes; glow discharges; temperature measurement; thermal conductivity; thermocouples; work function; Paschen curve; argon DC glow discharge; cathode material; cathode surface temperatures; cathode temperature; discharge properties; electrical characteristics; electron density; electron temperature; etching; glow discharge current-voltage pressure characteristics; in-house built single Langmuir probe; industrial applications; light sources; minimum breakdown voltages; plasma parameters; plasma potential; plasma processing; sputtering; thermal conductivities; thermocouple temperature measurements; thin film coating; welding; work functions; Cathodes; Glow discharges; Plasma temperature; Surface discharges; Temperature; Temperature measurement;
Conference_Titel :
Plasma Sciences (ICOPS), 2015 IEEE International Conference on
Conference_Location :
Antalya
DOI :
10.1109/PLASMA.2015.7179581
