Graphene synthesis by PECVD

Author

Noree, Sabah ; Bozduman, Ferhat ; Koc, I. Umran ; Gulec, Ali ; Ismael, Mohammed ; Durmaz, Yakup ; Oksuz, Lutfi

Author_Institution

Phys. Dept., Suleyman Demirel Univ., Isparta, Turkey

fYear

2015

fDate

24-28 May 2015

Firstpage

1

Lastpage

1

Abstract

PECVD method is attractive for SWCNTsyntheis due to the better control and it is providing appropriate environment for decomposition of carbon feed-stocks at a lower temperature (<;800) [1]. To produce graphene sheets on a copper surface the rf plasma source was built by using a quartz tube. The quartz tube was surrounded by a furnace for temperature control. As a carbon feed-stock an ethanol vapor was injected into the argon and hydrogen environment. The plasma environment will be analyzed by optical emission method and the effect of plasma power and the synthesis temperature on the graphene sheets will be analyzed by SEM, AFM and Raman spectra.

Keywords

Raman spectra; atomic force microscopy; graphene; plasma CVD; plasma diagnostics; plasma sources; scanning electron microscopy; AFM; C; Cu; PECVD; Raman spectra; SEM; SWCNTsyntheis; argon hydrogen environment; carbon feed-stocks; copper surface; decomposition; ethanol vapor; furnace; graphene sheets; graphene synthesis; low-temperature effects; optical emission method; plasma power effect; quartz tube; rf plasma source; temperature control; Carbon; Electron tubes; Graphene; Physics; Plasma temperature; Temperature control;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Sciences (ICOPS), 2015 IEEE International Conference on

Conference_Location

Antalya

Type

conf

DOI

10.1109/PLASMA.2015.7179692

Filename

7179692