• DocumentCode
    731544
  • Title

    Lossy frequency selective surfaces for gas sensing using ZnO films

  • Author

    Pardue, Colin ; Swaminathan, Madhavan ; Balaguru, John Bosco

  • Author_Institution
    Interconnect & Packaging Center, Georgia Inst. of Technol., Atlanta, GA, USA
  • fYear
    2015
  • fDate
    8-10 July 2015
  • Firstpage
    19
  • Lastpage
    20
  • Abstract
    Zinc Oxide (ZnO) has emerged as an intriguing material for environmental gas sensing. While many applications of ZnO thin films for gas sensing have been used, this paper proposes a novel technique in which ZnO thin films are patterned to form a lossy frequency selective surface (FSS). When the resistance of the ZnO changes with exposure to gas, there is a change in the amplitude and resonant frequency of the lossy FSS. A small change in the resonant frequency results in approximately 10 dB of amplitude shift at the original resonant frequency.
  • Keywords
    II-VI semiconductors; frequency selective surfaces; gas sensors; thin film sensors; wide band gap semiconductors; zinc compounds; FSS; ZnO; environmental gas sensing; lossy frequency selective surface; patterning; thin film sensor; Decision support systems; Nanoscale devices;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Nanoscale Architectures (NANOARCH), 2015 IEEE/ACM International Symposium on
  • Conference_Location
    Boston, MA
  • Type

    conf

  • DOI
    10.1109/NANOARCH.2015.7180578
  • Filename
    7180578