DocumentCode
731544
Title
Lossy frequency selective surfaces for gas sensing using ZnO films
Author
Pardue, Colin ; Swaminathan, Madhavan ; Balaguru, John Bosco
Author_Institution
Interconnect & Packaging Center, Georgia Inst. of Technol., Atlanta, GA, USA
fYear
2015
fDate
8-10 July 2015
Firstpage
19
Lastpage
20
Abstract
Zinc Oxide (ZnO) has emerged as an intriguing material for environmental gas sensing. While many applications of ZnO thin films for gas sensing have been used, this paper proposes a novel technique in which ZnO thin films are patterned to form a lossy frequency selective surface (FSS). When the resistance of the ZnO changes with exposure to gas, there is a change in the amplitude and resonant frequency of the lossy FSS. A small change in the resonant frequency results in approximately 10 dB of amplitude shift at the original resonant frequency.
Keywords
II-VI semiconductors; frequency selective surfaces; gas sensors; thin film sensors; wide band gap semiconductors; zinc compounds; FSS; ZnO; environmental gas sensing; lossy frequency selective surface; patterning; thin film sensor; Decision support systems; Nanoscale devices;
fLanguage
English
Publisher
ieee
Conference_Titel
Nanoscale Architectures (NANOARCH), 2015 IEEE/ACM International Symposium on
Conference_Location
Boston, MA
Type
conf
DOI
10.1109/NANOARCH.2015.7180578
Filename
7180578
Link To Document