An automatic acceleration compensation system for a single-mass MEMS gyroscope

This paper presents the architecture and experimental verification of an automatic acceleration compensation system applied to a single-mass MEMS gyroscope. The proposed method eliminates low frequency proof mass motion of the gyroscope due to external accelerations, suppressing the g-sensitivity of the gyroscope bias up to 12 times. This is achieved by dedicated acceleration cancellation electrodes (ACEs) for the first time in the literature, eliminating any degradation of the sensor bias stability and noise performance during the compensation process. The method is also verified to improve the scale factor nonlinearity from 2700ppm to 1800ppm for ±600°/s range, and for centrifugal accelerations as high as 0.5g.