Title :
Physical sensors for fluids
Author_Institution :
Inst. for Microelectron. & Microsensors, Johannes Kepler Univ. Linz, Linz, Austria
Abstract :
Physical sensors are suited for many applications where the state of a fluid has to be monitored or evaluated. In contrast to chemical sensors they do not employ chemical reactions with the fluid and thus avoid implications associated with these reactions. In this paper, we focus on our recent work on sensors for mechanical fluid properties such as viscosity.
Keywords :
sensors; viscosity measurement; fluid state; mechanical fluid properties; physical sensors; resonant sensors; viscosity; Liquids; Mathematical model; Sensors; Stress; Vibrations; Viscosity; Fluidic Sensors; Physical Sensors; Resonant Sensors;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181016
