Development of a MEMS-based electro-rheological microfinger system with an alternating pressure source

This paper presents a novel MEMS-based electro-rheological (ER) microfinger system with an alternating pressure source for multiple microactuator systems. Based on rectifying alternating flow by the ER microvalves, the ER microfinger system enables half number and small size of supply and return pipes, which is suitable for multiple microactuator systems. The MEMS-based finger part was realized by newly developed PDMS micromolding process featuring high-aspect-ratio and three-dimensional structures. This is the first time demonstration of bi-directional, large-displacement of 1.1 mm and high-speed (rise time of 1.1 s) bending motion of the fabricated 1.6-mm long ER microfinger.