Title :
Development of high resolution and high shockproof MEMS accelerometer for monitoring of structures
Author :
Morihara, D. ; Tatara, Y. ; Nakagawa, Y. ; Hosoya, K. ; Seki, T.
Author_Institution :
OMRON Corp., Japan
Abstract :
We developed MEMS accelerometer which has high resolution, flat characteristic at low-frequency range, and high resistance to shock. Decreasing noise and making mass heavier improve a resolution performance which is 0.05gal. Additionally resistance to shock is 20000G to optimize stopper size. In this paper, we describe the improvement of low-frequency noise and flattening frequency characteristic.
Keywords :
accelerometers; microfabrication; microsensors; shock measurement; flattening frequency characteristics; low-frequency noise characteristics; shockproof MEMS accelerometer; structure monitoring; 1f noise; Accelerometers; Mathematical model; Micromechanical devices; Piezoresistance; Silicon; MEMS accelerometer; monitoring of structures; noise;
Conference_Titel :
Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on
Conference_Location :
Anchorage, AK
DOI :
10.1109/TRANSDUCERS.2015.7181152
