Fully integrated microfluidic measurement system for real-time determination of gas and liquid mixtures composition

Author

Lotters, J.C. ; Groenesteijn, J. ; van der Wouden, E.J. ; Sparreboom, W. ; Lammerink, T.S.J. ; Wiegerink, R.J.

Author_Institution

Bronkhorst High-Tech BV, Ruurlo, Netherlands

fYear

2015

fDate

21-25 June 2015

Firstpage

1798

Lastpage

1801

Abstract

We have designed and realised a fully integrated microfluidic measurement system for real-time determination of both flow rate and composition of gas- and liquid mixtures. The system comprises relative permittivity sensors, pressure sensors, a Coriolis flow and density sensor, a thermal flow sensor and a thermal conductivity sensor. The composition of the mixture can be calculated from the physical properties - density, viscosity, heat capacity, thermal conductivity and relative permittivity - as measured by the integrated sensors in the system.

Keywords

chemical analysis; chemical variables measurement; density measurement; flow measurement; flow sensors; gas sensors; microfluidics; microsensors; permittivity measurement; pressure measurement; pressure sensors; specific heat; temperature measurement; temperature sensors; thermal conductivity measurement; viscosity measurement; Coriolis flow; density sensor; flow rate determination; fully integrated microfluidic measurement system; gas mixture composition determination; heat capacity; liquid mixture composition determination; permittivity sensor; pressure sensor; thermal conductivity sensor; thermal flow sensor; viscosity; Capacitive sensors; Permittivity; Permittivity measurement; Sensor systems; Thermal conductivity; Thermal sensors; Coriolis flow sensor; microfluidic system; multiparameter measurement system; pressure sensor; relative permittivity sensor; thermal flow sensor;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181296

Filename

7181296