Comparative study of different output metrics for a three weakly coupled resonator sensor

Author

Zhao, C. ; Wood, G.S. ; Xie, J. ; Chang, H. ; Pu, S.H. ; Kraft, M.

Author_Institution

Nano Res. Group, Univ. of Southampton, Southampton, UK

fYear

2015

fDate

21-25 June 2015

Firstpage

2196

Lastpage

2199

Abstract

This paper, for the first time, investigates the characteristics of different output metrics for a three degree-of-freedom (DoF) coupled resonator sensor. The main aspects examined are sensitivity and linear range. It is shown from theoretical estimations, equivalent RLC circuit model simulations and electrical measurements that using the vibration amplitude ratio as an output signal provides improved sensitivity and linearity range, compared to other methods such as shift in eigenstate, mode frequency or amplitude difference.

Keywords

RLC circuits; micromechanical resonators; microsensors; amplitude difference; eigenstate; electrical measurements; equivalent RLC circuit model simulations; linear range; mode frequency; output metrics; output signal; sensitivity; three degree-of-freedom coupled resonator sensor; vibration amplitude ratio; weakly coupled resonator sensor; Frequency measurement; Integrated circuit modeling; Micromechanical devices; Resonant frequency; Sensitivity; Vibrations; MEMS coupled resonator sensor; linear range; linear sensitivity; output metrics;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS), 2015 Transducers - 2015 18th International Conference on

Conference_Location

Anchorage, AK

Type

conf

DOI

10.1109/TRANSDUCERS.2015.7181396

Filename

7181396