Determination of the effective mass and stiffness of a micro resonator from a single optical characterization

We propose a method for the experimental determination of the effective mass and stiffness of a micro mechanical resonator using optical interferometry in a Fabry-Perot configuration. The method relies on the spectral analysis of the photodiode signal, which is ruled by the Jacobi-Anger expansion, allowing the absolute calibration of the vibration amplitude. Effective parameters are then calculated from the thermomechanical noise spectrum of the resonator. As an example of application, the method is applied to the determination of the effective parameters of an AFM probe.