Design and modelling of MEMS DC–DC converter

A new microelectromechanical systems (MEMS) design of an integrated DC-DC converter electrostatically driven is proposed. The converter has one output based on the tunable capacitor principle. The output voltage has been achieved by designing a capacitor with different gaps. Compared to previous research works, the complete mathematical model of the converter is proposed. To examine the dynamic behaviour of the converter two different methods are used: the differential quadratic method and the Galerkin method. The obtained results show good agreement between the methods. In addition, two mechanical switches are added in the structure to replace the conventional diodes that have the advantage of zero leakage current, low power consumption and synchronous operations. Results show that the converter takes about 22.73 ms to convert a 5 V voltage to a range of voltages that are varied from 10 to 50 V.