• DocumentCode
    732508
  • Title

    Advanced laser lift off in the manufacturing of LEDs

  • Author

    Mendes, Marco ; Porneala, Cristian ; Xiangyang Song ; Hannon, Mathew ; Sarrafi, Rouzbeh ; Schoenly, Joshua ; Sercel, Dana ; Dennigan, Sean ; VanGemert, Roy ; Chaplin, Heath ; Bickley, John ; Sercel, Jeff

  • Author_Institution
    Microsyst. Div., IPG Photonics, Manchester, NH, USA
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    Advanced laser lift off (LLO) techniques leading to high quality and high throughput fabrication of vertical and flip chip GaN and AlN based LEDs are discussed.
  • Keywords
    III-V semiconductors; aluminium compounds; gallium compounds; laser materials processing; light emitting diodes; optical fabrication; AlN; GaN; advanced laser lift off techniques; flip chip aluminium nitride based LED fabrication; flip chip gallium nitride based LED fabrication; vertical chip aluminium nitride based LED fabrication; vertical chip gallium nitride based LED fabrication; Aluminum nitride; Gallium nitride; III-V semiconductor materials; Laser beams; Light emitting diodes; Photonic band gap; Throughput;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7182940
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=732508