• DocumentCode
    732974
  • Title

    Fabrication of gratings with low spacing error by the dual-beam exposure system with spherical lens

  • Author

    Shiwei Wang ; Lijiang Zeng

  • Author_Institution
    Dept. of Precision Instrum., Tsinghua Univ., Beijing, China
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We propose a feedback method of adjusting the dual-beam exposure system with spherical collimation lenses based on deducing the spacing error from diffraction wavefront. The grating of 0.03 λ in 70×70 mm2 can be achieved.
  • Keywords
    diffraction gratings; lenses; optical fabrication; diffraction wavefront; dual-beam exposure system; feedback method; grating fabrication; spacing error; spherical collimation lenses; Diffraction; Diffraction gratings; Gratings; Lenses; Measurement uncertainty; Optical interferometry; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7183411
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=732974