Title :
An opto-electro-mechanical phase shifter
Author :
Pruessner, M.W. ; Park, D. ; Stievater, T.H. ; Kozak, D.A. ; Rabinovich, W.S.
Author_Institution :
Naval Res. Lab., Washington, DC, USA
Abstract :
We demonstrate an opto-electro-mechanical phase shifter. A suspended microbridge is electrostatically actuated to strongly-interact with a weakly-confined waveguide mode. The resulting effective index tuning substantially exceeds that achievable with thermo-optic and electro-optic approaches.
Keywords :
electro-optical devices; electro-optical effects; integrated optoelectronics; micro-optics; micromechanical devices; optical phase shifters; optical tuning; optical waveguides; refractive index; thermo-optical devices; thermo-optical effects; effective index tuning; electro-optic approaches; electrostatic actuation; opto-electro-mechanical phase shifter; suspended microbridge; thermo-optic approaches; weakly-confined waveguide mode; Bridge circuits; Electrodes; Indexes; Nonlinear optics; Optical device fabrication; Optical surface waves; Optical waveguides;
Conference_Titel :
Lasers and Electro-Optics (CLEO), 2015 Conference on
Conference_Location :
San Jose, CA
