• DocumentCode
    733872
  • Title

    Fabrication of complex three-dimensional metallic microstructures based on femtosecond laser micromachining

  • Author

    Feng Chen ; Qing Yang ; Chao Shan ; Keying Liu ; Xiangwei Meng ; Xun Hou

  • Author_Institution
    State Key Lab. for Manuf. Syst. Eng., Xi´an Jiaotong Univ., Xi´an, China
  • fYear
    2015
  • fDate
    10-15 May 2015
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The fabrication of complex metallic microstructures based on femtosecond laser micromachining and metal microsolidify process is demonstrated. This method is beneficial for building complex embedded 3D metal microstructures, electronic components, and hybrid electronic-microfluidic devices.
  • Keywords
    high-speed optical techniques; laser beam machining; microfluidics; micromachining; optical fabrication; solidification; 3D metal microstructures; complex three-dimensional metallic microstructures; electronic components; femtosecond laser micromachining; hybrid electronic-microfluidic devices; metal microsolidify process; Coils; Fabrication; Metals; Microchannels; Microstructure; Three-dimensional displays; Ultrafast optics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics (CLEO), 2015 Conference on
  • Conference_Location
    San Jose, CA
  • Type

    conf

  • Filename
    7184315
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=733872