An Optical Fiber Fabry–Pérot Pressure Sensor Using an SU-8 Structure and Angle Polished Fiber

Author

Zhu, Jiali ; Wang, Ming ; Shen, Meng ; Chen, Lu ; Ni, Xiaoqi

Author_Institution

Jiangsu Key Laboratory on Optoelectronic Technology, School of Physical Science and Technology, Nanjing Normal University, Nanjing, China

Volume

27

Issue

19

fYear

2015

Firstpage

2087

Lastpage

2090

Abstract

In this letter, a novel pressure sensor using an SU-8 structure and angle polished fiber is proposed. There are two different Fabry–Pérot cavities in the design, and the cavity lengths can be demodulated at the same time to realize temperature compensation. SU-8 photoresist is suited for forming a high-aspect-ratio structure and the thickness can be controlled precisely. The fabrication process is described and the lithography technology is employed. The characteristics of both pressure and temperature are tested. Experimental results show that the sensor has a good linearity over the pressure range of 0–0.1 MPa. The R-square is 0.998. The sensitivity (change in cavity/loaded pressure) is 60.9 $\\mu text{m}$ /MPa.

Keywords

Cavity resonators; Optical fiber sensors; Optical fibers; Optical interferometry; Temperature measurement; Temperature sensors; Fabry–Perot interferometer; Fabry???P??rot interferometer; SU-8 polymer; fiber optic sensor; lithography;

fLanguage

English

Journal_Title

Photonics Technology Letters, IEEE

Publisher

ieee

ISSN

1041-1135

Type

jour

DOI

10.1109/LPT.2015.2453318

Filename

7152848