A Dual-Stage Piezoelectric Stack for High-Speed and Long-Range Actuation

Author

Gang Yan ; Yong Liu ; Zhi Hua Feng

Author_Institution

Dept. of Precision Machinery & Precision Instrum., Univ. of Sci. & Technol. of China, Hefei, China

Volume

20

Issue

5

fYear

2015

Firstpage

2637

Lastpage

2641

Abstract

A dual-stage piezoelectric stack is presented. It consists of three parts, which are used for high-speed actuation, vibration isolation, and long-range actuation. This dual-stage piezoelectric stack is a modified piezoelectric stack and appears as a single stack. The first resonance frequency of the original piezoelectric stack is 40 kHz. The 1-dB cutoff frequency of the original piezoelectric stack is approximately 12 kHz, and the travel range is 16 μm. The 1-dB cutoff frequency of the dual-stage piezoelectric stack is approximately 85 kHz, and the travel range varies approximately from 1.2 to 12.8 μm. The main contribution of this paper is the use of a vibration isolation actuator to prevent coupling between high-speed and long-range actuators.

Keywords

piezoelectric actuators; vibration isolation; cutoff frequency; dual-stage piezoelectric stack; first resonance frequency; frequency 85 kHz; high-speed actuation; long-range actuation; nanopositioning; vibration isolation actuator; Actuators; Cutoff frequency; Force; Microscopy; Nanopositioning; Resonant frequency; Vibrations; Actuators; nanotechnology; piezoelectric devices; vibration control;

fLanguage

English

Journal_Title

Mechatronics, IEEE/ASME Transactions on

Publisher

ieee

ISSN

1083-4435

Type

jour

DOI

10.1109/TMECH.2015.2422351

Filename

7230335