DocumentCode :
743398
Title :
Plastic Compatible Sputtered {\\hbox {Ta}}_{2}{\\hbox {O}}_{5} Sensitive Layer for Oxide Semiconductor TFT Sensors
Author :
Branquinho, Rita ; Pinto, J.V. ; Busani, Tito ; Barquinha, Pedro ; Pereira, Luis ; Viana Baptista, Pedro ; Martins, Rui P. ; Fortunato, Elvira
Author_Institution :
Dept. de Cienc. dos Mater., Univ. Nova de Lisboa (UNL), Lisbon, Portugal
Volume :
9
Issue :
9
fYear :
2013
Firstpage :
723
Lastpage :
728
Abstract :
The effect of post-deposition annealing temperature on the pH sensitivity of room temperature RF sputtered Ta2O5 was investigated. Structural and morphological features of these films were analyzed before and after annealing at various temperatures. The deposited films are amorphous up to 600 °C and crystallize at 700 °C in an orthorhombic phase. Electrolyte-insulator-semiconductor (EIS) field effect based sensors with an amorphous Ta2O5 sensing layer showed pH sensitivity above 50 mV/pH. For sensors annealed above 200 °C pH sensitivity decreased with increasing temperature. Stabilized sensor response and maximum pH sensitivity was achieved after low temperature annealing at 200 °C, which is compatible with the use of polymeric substrates and application as sensitive layer in oxides TFT-based sensors.
Keywords :
amorphous semiconductors; annealing; chemical sensors; field effect transistors; tantalum compounds; EIS field effect based sensors; Ta2O5; amorphous sensing layer; annealing; deposited films; electrolyte-insulator-semiconductor field effect based sensor; orthorhombic phase; oxide semiconductor TFT sensor; pH sensitivity; plastic compatible sputtered sensitive layer; polymeric substrates; post-deposition annealing temperature; stabilized sensor response; temperature 200 degC; temperature 293 K to 298 K; temperature annealing; Annealing; Dielectrics; Sensitivity; Sensor phenomena and characterization; Surface morphology; Temperature sensors; Biosensors; electrolyte-insulator-semiconductor (EIS) sensor; pH sensitivity; sputtered ${hbox{Ta}}_{2}{hbox{O}}_{5}$ ;
fLanguage :
English
Journal_Title :
Display Technology, Journal of
Publisher :
ieee
ISSN :
1551-319X
Type :
jour
DOI :
10.1109/JDT.2012.2229693
Filename :
6378406
Link To Document :
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