Spatial Distribution of a High-Power Impulse Magnetron Sputtering Glow Plasma by a Controlled Unbalanced Magnetic Field

Spatial distribution of a high-power impulse magnetron sputtering carbon-glow plasma was investigated using a controlled unbalanced magnetic field, where a number of the inner magnets were varied. The magnets were arranged in a concentric circle and their number affected the production-zone of the plasma on the target, which simultaneously changed the instantaneous power consumed in the plasma. The plasma was produced at the region with the peak magnetic-field density and extended outward radially on the target with an increased number of the inner magnets.